Abstract:

When students take a lecture in Photonic Microstructure Technology, they learn about the processes which take place in a cleanroom, e.g. how a scanning electron microscope works, or how lithography is done. Acquiring the actual skills to perform these tasks is, however, cumbersome due to the limited accessibility of a cleanroom. Offering a substantial number of students the possibility to actually work there is not possible. We have created a VR App to train students in operating the machinery and doing the processes and alignment procedures in the cleanroom before their first entry.

The VR app serves two purposes. First of all, the students train how to operate the machines and what steps are necessary in handling the sample. We create an immersive environment with realistic 3D models. This includes learning to handle prepare different samples and operating the vacuum chambers or evaporators.

In the second stage, students train the acquisition of images with a scanning electron microscope. We have implemented a virtual user interface together with a mathematical model of the image formation process. This allows for completely computer rendered images and thus the possibility to evaluate the performance of the students by learning analytics. They are steered through the adjustment process in order to train skills before they enter the actual cleanroom.

Keywords:

Virtual Reality.