DIGITAL LIBRARY
MICROSTRUCTURE TECHNOLOGY TRAINING IN A VIRTUAL REALITY CLEANROOM
1 Friedrich Schiller University Jena (GERMANY)
2 Fraunhofer Institute for Applied Optics and Precision Engineering (GERMANY)
About this paper:
Appears in: ICERI2023 Proceedings
Publication year: 2023
Page: 6145 (abstract only)
ISBN: 978-84-09-55942-8
ISSN: 2340-1095
doi: 10.21125/iceri.2023.1532
Conference name: 16th annual International Conference of Education, Research and Innovation
Dates: 13-15 November, 2023
Location: Seville, Spain
Abstract:
Acquiring the skills to perform necessary production steps in microstructure technology is cumbersome due to the limited accessibility of a cleanroom. Offering a substantial number of students the possibility to actually work there is usually not possible and hands-on training possibilities on a beginner level are therefore limited. Our VR App provides realistic training in operating the machinery and understanding the processes behind the necessary tasks.

The VR app serves two purposes. First of all, learners train how to operate the machines and what steps are necessary in handling the sample. We create an immersive environment with realistic 3D models. This includes learning to handle prepare different samples and operating the vacuum chambers or evaporators.

In the second stage, students train the acquisition of images with a scanning electron microscope. We have implemented a virtual user interface together with a mathematical model of the image formation process. This allows for completely computer rendered images and thus the possibility to evaluate the performance of the students by learning analytics. They are steered through the adjustment process in order to train the relevant skills necessary to work in a cleanroom.
Keywords:
Virtual Reality, Cleanroom, Training.